Digital Gas Mass Flowmeter can accurately measure and control gas mass flow. It can measure corrosive gases, including ammonia, hydrogen sulfide, sulfur dioxide, etc. Small diameters such as φ3, φ6, φ8, φ10, and φ12 are available. Low flow measurement.
The digital mass flow meter consists of a mass flow sensor, laminar flow components, flow controller regulating valve and amplification control circuit. Using digital signal input and output, it has the characteristics of short warm-up time, small zero drift and high reliability. Can be configured as a mass flow meter or mass flow controller(MFC).
Features
Digital Gas Mass Flowmeter-Mass Flow Controller Technical Parameters
Digital Gas Mass Flowmeter-Low Range Model
| Product type | Mass Flow Controller | Mass Flow Meter | ||||||||
| Measuring range | 100SCCM ～30SLM; (0~5,10,20,30,50,100,200,300,500…) SCCM | |||||||||
| Measurement and control range | Controller range ratio 50:1 | Flow measurement range ratio 100:1 | ||||||||
| Accuracy | ±1.0%F.S | |||||||||
| Linear | ±0.5%F.S | |||||||||
| Repeat accuracy | ±0.2%F.S | |||||||||
| Response time | Flow controller: <0 .2s | Flow meter: <0.8s | ||||||||
| digital quantity | RS232/485, MODBUS protocol | |||||||||
| Analog quantity | 0 ～5V、 4-20mA、 1 ～5V | |||||||||
| powered by | ±15VDC ， 24VDC | |||||||||
| Operating temperature | 0 ～50℃ | |||||||||
| work pressure | Working pressure difference: 0.05~0.5MPa | Working pressure drop: <0.01Mpa | ||||||||
| Maximum withstand voltage | 3MPa/ 10MPa | |||||||||
| Electrical connections | DB15 hole | |||||||||
| Leak rate | 1 × 10-9 Pa m3/S | |||||||||
| Temperature Coefficient | ±0.025%F.S/℃ | |||||||||
| Base material | Stainless steel | |||||||||
| Sealing material | Fluorine rubber, neoprene rubber, nitrile rubber | |||||||||
| Connector | φ3 ， φ6 ， 1/8″ ， 1/4″ | |||||||||
Digital Gas Mass Flowmeter-Middle Range Model
| Product type | Mass Flow Controller | Mass Flow Meter | |||||||
| Measuring range | 30SLM ～300SLM | ||||||||
| Accuracy | ±1.5%F.S | ||||||||
| Linear | ±0.5%F.S | ||||||||
| Repeat accuracy | ±0.2%F.S | ||||||||
| work pressure | Working pressure difference: 0.05~0.5MPa | Working pressure drop: <0 .01Mpa | |||||||
| Response time | Flow controller: <2s | Flow meter: <0.8s | |||||||
| digital quantity | RS232/485, MODBUS protocol | ||||||||
| Analog quantity | 0 ～5V、4-20mA、 1 ～5V | ||||||||
| powered by | ±15VDC ，24VDC | ||||||||
| Operating temperature | 0 ～50℃ | ||||||||
| Maximum withstand voltage | 3MPa/ 10MPa | ||||||||
| Electrical connections | DB15 hole | ||||||||
| Leak rate | 1×10-9Pa m3/S | ||||||||
| Temperature Coefficient | ±0.025%F.S/℃ | ||||||||
| Base material | Stainless steel | ||||||||
| Sealing material | Fluorine rubber, neoprene rubber, nitrile rubber | ||||||||
| Connector | φ8 ， φ10 ， φ12 | ||||||||
| Measurement and control range | Controller range ratio 50:1 | Flow measurement range ratio 100:1 | |||||||
Digital Gas Mass Flowmeter-High Range Model
| Product type | Mass Flow Controller | Mass Flow Meter | |||||||
| Measuring range | 500SLM ～3000SLM | ||||||||
| Measurement and control range | Controller range ratio 50:1 | Flow measurement range ratio 100:1 | |||||||
| Accuracy | ±1.0%F.S | ||||||||
| Linear | ±0.5%F.S | ||||||||
| Repeat accuracy | ±0.2%F.S | ||||||||
| Response time | Flow controller: <2s | Flow meter: <0.8s | |||||||
| digital quantity | RS232/485, MODBUS protocol | ||||||||
| Analog quantity | 0 ～5V、4-20mA、 1 ～5V | ||||||||
| powered by | ±15VDC ，24VDC | ||||||||
| Operating temperature | 0 ～50℃ | ||||||||
| work pressure | Working pressure difference: 0.05~0.5MPa | Working pressure drop: <0 .01Mpa | |||||||
| Maximum withstand voltage | 3MPa/ 10MPa | ||||||||
| Electrical connections | DB15 hole | ||||||||
| Leak rate | 1×10-9Pa m3/S | ||||||||
| Temperature Coefficient | ±0.025%F.S/℃ | ||||||||
| Base material | Stainless steel | ||||||||
| Sealing material | Fluorine rubber, neoprene rubber, nitrile rubber | ||||||||
| Connector | φ12, Flange Installation | ||||||||
Digital Gas Mass Flowmeter-Mass Flow Controller working principle
The excellent accuracy, robustness and reliability of gas mass flow controllers come from our unique sensor probes. The sealed probe consists of two sensing elements, a speed sensor and a temperature sensor, which can automatically correct the effects of temperature and pressure changes.
The instrument circuit heats the speed sensor to a constant value above the gas temperature and then measures the cooling effect of the gas flow. The flow rate is calculated based on the principle that the electrical power consumed to maintain a constant temperature difference is proportional to the mass flow rate of the gas.
Both sensors are standard grade platinum resistance temperature detectors (RTDs). Platinum RTD wire is wrapped around a strong ceramic mandrel for strength and reliability. The entire sensor is sealed in a 316 stainless steel packaging case.
Digital Gas Mass Flowmeter-Mass Flow Controller Application
Digital Gas Mass Flowmeter – A mass flow controller (abbreviated as MFC) is used for precise measurement and control of the mass flow of gases.
They play an important role in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, industry, medicine, environmental protection and vacuum lamps.
Typical applications include:
- Electronic process equipment, such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation;
- As well as coating equipment, optical fiber smelting, micro-reaction devices, gas mixing and distribution systems, capillary measurement, gas chromatographs and other analytical instruments;
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Digital Gas Mass Flowmeter-Mass flow controller (abbreviated as MFC) is an analog and digital compatible design. It can display instantaneous flow and cumulative flow through analog secondary instruments and PLC, and can also communicate directly with the computer through a digital interface.
Our Sino-Inst Digital Gas Mass Flowmeter-mass flow controller adopts multiple gas and multiple range design solutions to easily meet the user’s on-site use needs. The measuring range is optional (0~5, 10, 20, 30, 50, 100, 200, 300, 500…) SCCM; (0~1, 2, 3, 5, 10, 50, 100, 200, 500, 1000… 3000) SLM; supports customization of other parameters .
If you need to purchase Digital Gas Mass Flowmeter-mass flow controller, or have related technical questions, please feel free to contact us.
Digital Gas Mass Flowmeter-Mass Flow Controller For Gas Micro Flow
Digital Gas Mass Flowmeter-mass flow controller (MFC) is used for precise measurement and control of the gases mass flow. φ3, φ6, φ8, φ10, and φ12 are available.
Product SKU: Digital Gas Mass Flowmeter-Mass Flow Controller
Product Brand: Sino-Inst
Product Currency: USD
Product Price: 1299
Price Valid Until: 2029-09-09
Product In-Stock: InStock
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