SI-1500 Sputtered Thin Film Pressure Sensor

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SI-1500 Sputtered Thin Film Pressure Sensor

Sputtered Thin Film Pressure Sensor is a pressure sensor with higher pressure. Can work at 2200bar, high pressure resistance and burst pressure.

The pressure sensitive element of SI-1500 Sputtered Thin Film Pressure Sensor adopts sputtering process. On the 17-4PH stainless steel diaphragm directly acting on the pressure medium, a “micron” level resistance film is produced by molecular bonding. Then, the required Wheatstone bridge is produced through microelectronic technology to form an all-metal sensitive element. Without any adhesives and moving parts, there is no need for sealed chambers and oil-filled chambers. Therefore, it has the characteristics of being suitable for harsh environments and long-term stable work.

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Pressure Sensors

Features of Sputtered Thin Film Pressure Sensor

  • Both elastomers and strained materials are metallic materials.
  • Sputtering process instead of paste process, no creep, no aging, good temperature characteristics
  • Wide working temperature range: conventional products -40℃～125℃, special products -55℃～180℃
  • Good long-term stability, anti-instantaneous pressure shock
  • Measurable pressure up to 220MPa

SI-1500 Sputtered Thin Film Pressure Sensor Specifications

Measuring medium:Liquid or gas compatible with 17-4PH stainless steel
Range:0…25MPa…40MPa…60MPa…220MPa
Overload:2 times full scale pressure
Pressure type:Gauge
Accuracy:±0.2%FS; ±0.5%FS
Long-term stability:±0.1%FS/year; ±0.2%FS/year
Zero temperature coefficient:±0.02%FS/℃
Full scale temperature coefficient:±0.01%FS/℃
Compensation temperature:-10~80℃
Medium temperature:-40~200℃
Operating temperature:-30~85℃
Power supply:24VDC (12~28V)
Output signal:4-20mA; 0-5VDC; 0-10VDC;
customer optional
Load capacity:≤(U-10)/0.20Ω; RS485 bus can connect 99 transmitters
Insulation resistance:100MΩ，500VDC
Shell protection:IP65
Vibration:10G peak，20~2400Hz
Shock:20G，11msec，1/2sine
Electrical connection: Hessmann connector or special shielded cable 1.5 meters

Order Guide

SI-1500 Sputtered Thin Film Pressure Sensor
CodeRange
(0~X)KPa0-0.1…100MPa
CodeOutput Signal
B14-20mA
B30-10v
B40-5v
B51-5v
CodeProcess Connection
P1M20*1.5
P3G1/4
P4G1/2
CodeElectrical connections
C1Hirschman joint
C2cable output
C3Aviation Connector
C5M12*1
SI-1500  (0-1)MPa B1B7  P1 C1  

Learn More About Sputtered Thin Film Pressure Sensor

The sputtering film pressure sensor uses ion beam sputtering and etching technology to make thin-film resistors on the stainless steel elastic diaphragm to form a Wheatstone bridge. The fluid pressure acts on the stainless steel elastic diaphragm to deform it and cause resistance. Change, the bridge outputs an electrical signal proportional to the pressure, through a series of signal processing and error correction, it is converted into a standard electrical signal output, so as to realize the measurement of pressure. the

Some key technologies in the production of sputtering film pressure sensors include: materials and processing of elastic diaphragms, sputtering film preparation technology, photolithography and laser resistance adjustment technology, product stability technology. Including elastic body stress, film internal stress, product Accelerated removal of assembly stress in advance, stability treatment of thin film lattice and structural defects, etc. These are the bottlenecks in the mass production of sputtered film pressure sensors at low cost.

The pressure-sensitive core of the sputtering thin-film pressure sensor is to deposit insulating and sensitive thin films on high-strength corrosion-resistant stainless steel by using ion beam sputtering film-forming equipment. Replace the traditional sticky organic compound substrate and metal sensitive gate. Then it is formed by sputtering a protective film to protect the sensitive film.

Secondly, the thin film pressure sensor welds the sensitive core and the stainless steel pressure nozzle into a whole by laser welding or plasma welding. Therefore, the sputtered film pressure sensor has the following advantages:

  1. The sputtering film pressure sensor has good long-term stability, wide working temperature, high precision and good repeatability. Since the insulating film and the substrate, the sensitive film and the insulating film are directly deposited together in a high vacuum environment. The interlayers of the film are combined by atomic force, which eliminates the effect of creep caused by the adhesive tape. At the same time, the sensitive film is protected by a silicon dioxide protective film in a high vacuum environment. Therefore, it is characterized by high precision, good repeatability and long-term stability. Wide working temperature. Through different designs, the pressure-sensitive core with a temperature resistance of -200℃∽400℃ can be achieved. It can work under high temperature and high pressure for a long time.
  2. The sputtering film pressure sensor is resistant to high-intensity vibration and impact, no leakage, and corrosion resistance. Since the thin film pressure sensor is welded into a whole by means of laser welding or plasma welding, the sensitive core body and the stainless steel pressure joint are welded. Therefore sputtered thin film pressure sensors do not have any “O” rubber seals. There is no silicone oil filling, and the pressure medium directly acts on the corrosion-resistant stainless steel sensitive core. The product can withstand high-intensity vibration and impact, and there is absolutely no danger of leakage.
  3. The sputtering film pressure sensor has good temperature characteristics. The thin film pressure sensor adopts semiconductor process technology and laser resistance trimming technology. , using the self-compensation characteristics of the bridge, at -200 ° C ∽ 400 ° C. The temperature drift in the whole temperature range is less than 0.02%/℃.
  4. The sputtering film pressure sensor has real measurement and high frequency response. Because the pressure medium directly acts on the corrosion-resistant stainless steel sensitive core. No diaphragm and filling fluid. Therefore, the measurement is real and the frequency response is high. The designed frequency response can reach above 20KHZ.

Sputtered thin-film pressure sensors are ideal for high-volume scale pressure measurements. However, it is generally not suitable to use sputtered film pressure sensors below the pressure range of 400KPA.

TypeAdvantagesDisadvantages
Diffused silicon piezoresistive1. High precision at room temperature;
2. Small range and absolute pressure products are superior to other types of products.		1. The temperature drift is large, and the performance will be greatly reduced when it is lower than 0°C or higher than 40°C;
2. The diaphragm is easily damaged, and the measurement medium is strictly required;
3. The pressure range is limited, not suitable for large pressure measurement.
Thick film ceramic piezoresistive1. Low cost;
2. Good corrosion resistance;
3. The scope of application is wider than that of diffused silicon.		1. Poor precision and poor stability;
2. When the pressure drops, it is difficult to return to zero;
3. The diaphragm is fragile and easy to leak.
Capacitive1. The process is mature and the stability is good;
2. Strong overload capacity and strong corrosion resistance.		1. The cost is high;
2. Large volume, inconvenient for installation and maintenance.
Strain gauge1. Low cost;
2. Mature adhesive process.		1. Manual production, large discreteness;
2. Large drift and poor stability.
Sapphires1. High precision and wide temperature range;
2. Wide measuring range;
3. Small size and light weight.		1. High cost;
2. The process is complicated and the technical requirements are high;
3. Sensitive materials need to be imported.
Sputtered Thin Film Strain Gauge1. High precision and wide temperature range;
2. Small temperature drift and good stability;
3. Small size and light weight;		1. High cost;
2. Not suitable for small range and differential pressure measurement.

If you cannot find an answer to your question in our Sputtered Thin Film Pressure Sensor, you can always contact us and we will be with you shortly.

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More Featured Pressure Sensors

Sino-Inst is a manufacturer of Sputtered Thin Film Pressure Sensors. We supply more than 20 types of Pressure Sensors.

There are many types of pressure sensors, such as resistance strain gauge pressure sensors, semiconductor strain gauge pressure sensors, Silicon piezoresistive pressure sensors, inductive pressure sensors, capacitive pressure sensors, resonant pressure sensors and capacitive sensors.

The sputtering thin film pressure sensor is a piezoresistive Wheatstone bridge formed by sputtering coating technology on stainless steel (generally 17-4ph) elastomers. Then weld this elastic body in the stainless steel shell, and add a signal processing circuit to convert it into a voltage or current output.

The advantage of the sputtered film pressure sensor is that it can withstand high pressure, can work at 2200bar, and has high pressure resistance and burst pressure. Compared with products with the same voltage resistance, it has a lower cost advantage.

Sino-Inst has provided pressure measurement solutions to customers for many years. Our pressure sensor, made in China. Widely exported to the United States, Britain, Germany, South Africa, Norway and other countries.

If you need SI-1500 Sputtered Thin Film Pressure Sensors, but have technical questions, please feel free to contact our sales engineers.

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    SI-1500 Sputtered Thin Film Pressure Sensor | Sino-Inst

    Sputtered Thin Film Pressure Sensor is a pressure sensor with higher pressure. Can work at 2200bar, high pressure resistance and burst pressure.

    Product SKU: SI-1500 Sputtered Thin Film Pressure Sensor

    Product Brand: Sino-Inst

    Product Currency: USD

    Product Price: 180

    Price Valid Until: 2029-09-09

    Product In-Stock: InStock

    Editor's Rating:
    5