High Pressure Mass Flow Controller/Flow Meter for Gas

High Pressure Mass Flow Controller

The high pressure mass flow controller/flow meter is designed for high-pressure applications, measuring or controlling the flow rate of high-pressure gases. It features good pressure resistance, suitable for applications above 20MPa, and can be customized for 20-60MPa. For example, it is suitable for high-pressure hydrogen refueling units in the hydrogen energy industry.

Features

  • Accuracy up to ±0.5% F.S.;
  • Repeatability up to ±0.2% F.S.;
  • Fast response and regulation speed;
  • Touchscreen display;
  • Direct measurement of mass flow;
  • Automatic temperature compensation;
  • Integrated PID controller for flow regulation;
  • Manual switching of measured gas media;
  • Thermal principle with rapid response and high accuracy;
  • Tubular splitter design minimizes clogging;
  • Suitable for various high-pressure pipelines;
  • Short warm-up time, low zero drift, high reliability;
  • Analog I/O supports flow control and display via secondary meters or flow computers;
  • Digital communication protocols include RS485/232 Modbus, Profibus, DeviceNet, etc.

Featured Parameters

High-precision mass flow controllerHigh-precision mass flow meter
Technical indicators
Measurement Range2SCCM~10000SLM(customizable)2SCCM~10000SLM(customizable)
Control RangeController valve control range 50:1Flow measurement range ratio of 100:1
Accuracy±0.5% F.S. (Full Scale) 
Linearity±0.25%F.S
Repeatability±0.2%F.S
Response Time<0.2s<0.1s
Temperature Coefficient±0.025%F.S/℃
Operating Temperature0~50℃
Warm-up TimeReady to use in 30 seconds, reaches optimal performance in 5 minutes. 
Operating PressureWorking Pressure Differential: 0.1~0.5 MPa   
Working Pressure Drop: <0.01 MPa    
Maximum Pressure Rating3 MPa/10 MPa   
20 MPa~60 MPa available upon request 
Leak Rate1×10-9Pa·m3/S
Mechanical components  
Base MaterialStainless steel
Connectorφ8, φ10, φ12, flange mounting
Seal MaterialFluororubber, neoprene, nitrile rubber, metal seal
Enclosure Protection RatingIP40
Mounting PositionHorizontal mounting
Electrical performance
Electrical ConnectionsDB9 connector, RJ11, 5.5×2.1 quick-connect power connector
Display StatusWith LCD display, without LCD display
Digital QuantitiesRS232/485, MODBUS protocol, PROFIBUS protocol
Analog Quantities0~5V、4-20mA、1~5V
Power Supply24VDC、±15VDC

High Pressure Mass Flow Controller/Flow Meter Principle

High Pressure Mass Flow Controller for gas

The High Pressure Mass Flow Controller/Flow Meter boasts a measurement error of only ±0.5% of full scale. This series’ superior accuracy stems from its unique sensor probe. This sealed probe consists of two sensing elements—a velocity sensor and a temperature sensor. It can automatically correct for the effects of temperature and pressure changes.

The instrument circuit heats the speed sensor to a constant value above the gas/liquid temperature, then measures the cooling effect of the gas flow rate.

The flow rate is calculated based on the principle that the electrical power consumed to maintain a constant temperature difference is proportional to the gas mass flow rate. Both sensors are standard-grade platinum resistance temperature detectors (RTDs), sealed in a 316 stainless steel housing.

High Pressure Mass Flow Controller Applications

The high-pressure mass flow controller has a measurement error of ±0.5% of full scale, sufficient to meet the needs of most customers. It can be used in various laboratory experiments as well as in complex industrial environments.

To adapt to complex industrial environments, some models also support IP67 dust and water resistance and IICT4 intrinsically safe explosion protection. In addition to standard analog input/output interfaces, it also supports 485/232 interfaces, using the standard Modbus RTU communication protocol.

Commonly used in the following industries:

  • Vacuum coating;
  • New energy sources such as solar and hydrogen energy;
  • Semiconductors;
  • Petroleum, petrochemicals, and fine chemicals;
  • Power generation and metallurgy;
  • Environmental protection;
  • Food packaging;
  • Biomedicine;
  • New materials;
  • Industrial manufacturing;
  • Various analytical instruments;
  • Gas production and distribution systems

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In some industrial applications, especially in the oil and petrochemical industries, high-pressure gas applications exceeding 10 MPa are required. For example, pressures between 10 MPa and 40 MPa are common. Currently, other brands of MFCs are widely used in such high-pressure gas flow control applications, but these are expensive, have long lead times, and slow after-sales service.

Sino-Inst, leveraging years of R&D experience and referencing the characteristics of various brands, has collaborated with users to develop MFCs capable of withstanding pressures exceeding 10 MPa. These are widely used in various industries for precise measurement and control of gas mass flow rates. Please feel free to contact our application engineers for customized high-pressure mass flow controllers.

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