Thermal Mass Flow Meter Correction Factor Guide

Thermal Mass Flow Meter Correction Factor Guide

Thermal Mass Flow Meters and thermal mass flow controllers are suitable for most gaseous media. If a gas mass flow controller or thermal mass flow meter is factory-calibrated for one gas, but you want to switch to another, then a gas correction factor (GCF) is needed.

What is Thermal Mass Flow Meter Correction Factor?

The gas conversion factor (GCF) of a thermal mass flow meter is a coefficient used to correct for the measurement of different gas flow rates. The GCF of a thermal gas mass flow meter is mainly related to the gas’s density, specific heat at constant pressure, and molecular composition. It is usually calibrated at the factory and can be used directly by the user.

Currently, most gas mass flow controllers and mass flow meters are calibrated with nitrogen or air at the factory. If the actual gas used is different, conversion using the gas conversion factor is required, even for flow controllers and mass flow meters from other brands (such as ABB, E+H, and Kobold). This is especially true for mixed gases, which are difficult to calibrate before leaving the factory, making the calculation of the conversion factor even more crucial.

As the manufacturer, our thermal mass flow meters have the relevant gas conversion factors pre-adjusted before leaving the factory, so you can use them directly. However, if you need to switch between different gases during use, you will need to manually input the corresponding gas conversion factor.

Thermal Mass Flow Meter Correction Factor

Thermal Mass Flow Meter Correction Factor Reference

Currently, most factories cannot calibrate mass flow rates according to the actual gas used by the user. Calibration is usually performed by converting the actual gas flow rate into the flow rate of air or nitrogen.

When you use it, the output display will directly show the mass flow rate or volumetric flow rate of the actual gas used.

Conversion between different gases is done using conversion factors. The conversion factors for single-component gases can be found in a table. The table below shows the densities and relative air conversion factors for common gases applicable to our company’s thermal flow meters.

No.GasesSpecific heat (cal/g/℃)Density (g/L 0℃)Conversion factor
0Air0.241.20481.000 
1Argon (Ar)0.1251.66051.4066
2Arsenane (AsH3)0.11683.4780.669
3Borne tribromide (BBr3)0.064711.180.3758
4Borne trichloride (BCl3)0.12175.2270.4274
5Borne trifluoride (BF3)0.17793.0250.4384
6Boronane (B3H6)0.5021.2350.505
7Carbon tetrachloride (CCl4)0.12976.860.3052
8Carbon tetrafluoride (CF4)0.16593.96360.4255
9Methane (CH4)0.53180.7150.7147
10Ethylene (C2H4)0.36581.2510.5944
11Ethane (C2H6)0.42411.3420.4781
12Propanyne (C3H4)0.36331.7870.4185
13Propylene (C3H6)0.36591.8770.3956
14Propane (C3H8)0.3991.9670.3459
15Butyne (C4H6)0.35152.4130.3201
16Butene (C4H8)0.37232.5030.2923
17Butane (C4H10)0.4132.5930.2535
18Pentane (C5H12)0.39163.2190.2157
19Methanol (CH3OH)0.32771.430.5805
20Ethanol (C2H6O)0.33982.0550.3897
21Trichloroethane (C3H2Cl3)0.16545.950.2763
22Carbon monoxide (CO)0.24881.250.994
23Carbon dioxide (CO2)0.20171.9640.7326
24Oxygen (C2N2)0.26082.3220.4493
25Chlorine (Cl2)0.11453.163.0.8529
26Deuterium (D2)1.73250.17980.9921
27Fluorine (F2)0.1971.6950.9255
28Germanium tetrachloride (GeCl4)0.10729.5650.2654
29Germanane (GeH4)0.14053.4180.5656
30Hydrogen (H2)3.42240.08991.004
31Hydrogen bromide (HBr)0.08613.610.994
32Hydrogen chloride (HCl)0.19111.6270.994
33Hydrogen fluoride (HF)0.34820.8930.994
34Hydrogen iodide (HI)0.05455.7070.993
35Hydrogen sulfide (H2S)0.22781.520.839
36Helium (He)1.24180.17861.4066
37Neon (Kr)0.05933.7391.4066
38Nitrogen N20.24861.250.994
39Neon0.24640.91.4066
40Ne0.50050.760.7147
41Ammonia0.23781.3390.9702
42NH30.19232.0520.7366
43Nitric oxide0.20981.9640.7048
44NO0.21961.4270.9861
45Nitric oxide0.12476.1270.3559
46NO20.2611.5170.6869
47Dinitrogen monoxide0.16115.620.3002
48N2O0.13246.8450.3002
49Oxygen0.1277.58470.2823
50O20.16924.6430.3817
51Phosphorus trichloride0.31891.4330.5954
52PCI30.14724.5060.4095
53Phosphine0.13326.0430.338
54PH30.15886.5160.2624
55Phosphorus pentafluoride0.14892.8580.6829
56PF50.15728.4650.2048
57Phosphorus oxychloride0.095613.290.2137
58POCl30.03795.8581.4066

Calculation of Gas Correction Factor (GCF)

For thermal mass flow meters and flow controllers, the gas conversion factor is mainly related to the density, specific heat at constant pressure, and molecular composition of the gas (e.g., He is a monatomic gas, while N2 is a diatomic gas).

The table above shows single gases. For mixed gases, the proportion of each gas needs to be known. Then, a reasonable calculation is performed based on the gas conversion factor algorithm. If you are interested in the specific algorithm, please contact us.

Conversion for single gases is relatively simple. For the same flow meter, simply multiply the nitrogen flow rate by the corresponding gas conversion factor.

For example, if the nitrogen flow rate is 20 liters/minute and the argon conversion factor is 1.415, then the actual argon flow rate = 20 SLPM * 1.415 = 28.3 SLPM. However, most manufacturers now perform the conversion at the factory, so customers can use it directly without further conversion.

The machine is factory-calibrated for 20 SLPM of acetylene gas. If you actually want to use propane gas, the conversion method is: 20 ÷ 0.581 (acetylene gas conversion coefficient) x 0.348 (propane gas conversion coefficient) ≈ 12 liters/minute, which corresponds to the corresponding propane flow rate. It’s important to note that the full-scale setting must also be considered when converting between different gases.

Of course, we do not recommend frequent gas switching unnecessarily, as this may affect the measurement accuracy of the equipment.

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Thermal mass flow meters and controllers have a wide range of applications. They offer advantages such as fast response, wide rangeability, high accuracy, and no moving parts (low maintenance costs), requiring no additional temperature or pressure compensation.

Sino-Inst has many years of experience in gas flow measurement and control. We supply various customized solutions for high-temperature, high-pressure, and low-flow-rate measurements. Please feel free to contact our application engineers if needed!

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