
The high pressure mass flow controller/flow meter is designed for high-pressure applications, measuring or controlling the flow rate of high-pressure gases. It features good pressure resistance, suitable for applications above 20MPa, and can be customized for 20-60MPa. For example, it is suitable for high-pressure hydrogen refueling units in the hydrogen energy industry.
Features
Featured Parameters
| High-precision mass flow controller | High-precision mass flow meter | |
| Technical indicators | ||
| Measurement Range | 2SCCM~10000SLM(customizable) | 2SCCM~10000SLM(customizable) |
| Control Range | Controller valve control range 50:1 | Flow measurement range ratio of 100:1 |
| Accuracy | ±0.5% F.S. (Full Scale) | |
| Linearity | ±0.25%F.S | |
| Repeatability | ±0.2%F.S | |
| Response Time | <0.2s | <0.1s |
| Temperature Coefficient | ±0.025%F.S/℃ | |
| Operating Temperature | 0~50℃ | |
| Warm-up Time | Ready to use in 30 seconds, reaches optimal performance in 5 minutes. | |
| Operating Pressure | Working Pressure Differential: 0.1~0.5 MPa Working Pressure Drop: <0.01 MPa | |
| Maximum Pressure Rating | 3 MPa/10 MPa 20 MPa~60 MPa available upon request | |
| Leak Rate | 1×10-9Pa·m3/S | |
| Mechanical components | ||
| Base Material | Stainless steel | |
| Connector | φ8, φ10, φ12, flange mounting | |
| Seal Material | Fluororubber, neoprene, nitrile rubber, metal seal | |
| Enclosure Protection Rating | IP40 | |
| Mounting Position | Horizontal mounting | |
| Electrical performance | ||
| Electrical Connections | DB9 connector, RJ11, 5.5×2.1 quick-connect power connector | |
| Display Status | With LCD display, without LCD display | |
| Digital Quantities | RS232/485, MODBUS protocol, PROFIBUS protocol | |
| Analog Quantities | 0~5V、4-20mA、1~5V | |
| Power Supply | 24VDC、±15VDC | |
High Pressure Mass Flow Controller/Flow Meter Principle

The High Pressure Mass Flow Controller/Flow Meter boasts a measurement error of only ±0.5% of full scale. This series’ superior accuracy stems from its unique sensor probe. This sealed probe consists of two sensing elements—a velocity sensor and a temperature sensor. It can automatically correct for the effects of temperature and pressure changes.
The instrument circuit heats the speed sensor to a constant value above the gas/liquid temperature, then measures the cooling effect of the gas flow rate.
The flow rate is calculated based on the principle that the electrical power consumed to maintain a constant temperature difference is proportional to the gas mass flow rate. Both sensors are standard-grade platinum resistance temperature detectors (RTDs), sealed in a 316 stainless steel housing.
High Pressure Mass Flow Controller Applications
The high-pressure mass flow controller has a measurement error of ±0.5% of full scale, sufficient to meet the needs of most customers. It can be used in various laboratory experiments as well as in complex industrial environments.
To adapt to complex industrial environments, some models also support IP67 dust and water resistance and IICT4 intrinsically safe explosion protection. In addition to standard analog input/output interfaces, it also supports 485/232 interfaces, using the standard Modbus RTU communication protocol.
Commonly used in the following industries:
- Vacuum coating;
- New energy sources such as solar and hydrogen energy;
- Semiconductors;
- Petroleum, petrochemicals, and fine chemicals;
- Power generation and metallurgy;
- Environmental protection;
- Food packaging;
- Biomedicine;
- New materials;
- Industrial manufacturing;
- Various analytical instruments;
- Gas production and distribution systems
More High Pressure Measurement and Control Solutions
Guide for High Pressure Flow Meters – Industrial Liquid & Gas Measurement
Customized Case: High Temperature and High Pressure Pressure Measurement -100MPa-700℃
Industrial Pressure Sensors for High Pressure Measurement
High Pressure Magnetic Flow Meter |16MPa-25MPa-35MPa-42MPa
High-Pressure Flow Meters
More Powerful Pressure Transmitter with Diaphragm Seal and Capillary
In some industrial applications, especially in the oil and petrochemical industries, high-pressure gas applications exceeding 10 MPa are required. For example, pressures between 10 MPa and 40 MPa are common. Currently, other brands of MFCs are widely used in such high-pressure gas flow control applications, but these are expensive, have long lead times, and slow after-sales service.
Sino-Inst, leveraging years of R&D experience and referencing the characteristics of various brands, has collaborated with users to develop MFCs capable of withstanding pressures exceeding 10 MPa. These are widely used in various industries for precise measurement and control of gas mass flow rates. Please feel free to contact our application engineers for customized high-pressure mass flow controllers.



